SPECIALTY CHEMICALS FOR ELECTRONICS
(ALD/CVD/MOCVD PRECURSORS)

EpiValence is highly focussed, dedicated to providing the highest quality products and services on a Global basis to meet customer requirements now and in the future. Strategic alliances and investments have secured EpiValence’s position and ensure it will remain one of the leading specialty chemical suppliers to the electronics market worldwide.

The full range of EpiValence products covers a number of diverse applications and numerous added value services including technical and customer support are available.

A core series of chemicals available are those suited to vapour phase deposition techniques such as MOCVD, ALD and CVD precursors. EpiValence expertise ensures a wide range of chemistries for different elements is covered by our standard offerings as listed below. Custom synthesis is also available to provide compounds not listed.

Product Portfolio for CVD/ALD Processes:
Aluminium
Aluminium trimethylMe3Al75-24-1
Aluminium tert-butoxideAl(OtBu)3556-91-2
Aluminium dimethyl isopropoxideMe2Al(OiPr)6063-89-4
Aluminium tetramethylheptanedionateAl(THD)314319-08-5
Antimony
Antimony ethoxideSb(OEt)310433-06-4
Antimony isopropoxideSb(OiPr)318770-47-3
Barium
Barium tetramethyl heptanedionateBa(THD)217594-47-7
Bismuth
Bismuth hexafluoracetylacetonateBi(hfac)3141364-06-9 &142617-56-9
Bismuth tetramethyl heptanedionateBi(THD)3142617-53-6
Cadmium
Cadmium dimethylMe2Cd506-82-1
Calcium
Calcium tetramethylheptanedionateCa(THD)2118448-18-3
Cerium(IV)
Cerium isopropoxide isopropanolCe(OiPe)4.iPrOH63007-83-0
Cerium tetramethylheptanedionateCe(THD)418960-54-8
Cobalt(II)
Cobalt tetramethylheptanedionateCo(THD)213986-53-3
Copper(I)
Copper hexafluoroacetylacetonate cyclooctadieneCu(hfac).COD86233-74-1
Copper(II)
Copper tetramethylheptanedionateCu(THD)214040-05-2
Erbium
Erbium tetramethylheptanedionateEr(THD)335733-23-4
Europium
Europium tetramethylheptanedionateEu(THD)315522-71-1
Gadolinium
Gadolinium tetramethylheptanedionateGd(THD)314768-15-1
Gallium
Gallium tetramethylheptanedionateGa(THD)334228-15-4
Gallium trimethylMe3Ga1445-79-0
Germanium
Germanium ethoxideGe(OEt)413165-55-0
Germanium isopropoxideGe(OiPr)421154-48-3
Germanium methoxideGe(OMe)4992-91-6
Hafnium
Hafnium tert-butoxideHf(OtBu)42172-02-3
Hafnium ethoxideHf(OEt)413428-80-3
Hafnium isopropoxide isopropanolHf(OiPr)4.iPrOH59301-57-4
Hafnium dimethylamideHf(NMe2)419782-68-4
Hafnium chlorideHfCl413499-05-3
Hafnium tetramethylheptanedionateHf(THD)463370-90-1
Indium
Indium acetylacetonateIn(acac)314405-45-9
Indium isopropoxideIn5O(OiPr)13118240-53-2
Indium TrimethylMe3In3385-78-2
Iridium
Iridium acetylacetonateIr(acac)315635-87-7
Iron(III)
Iron tetramethylheptanedionateFe(THD)314876-47-2
Lanthanum
Lanthanum tetramethylheptanedionateLa(THD)314319-13-2
Lithium
Lithium tert-butoxideLiOtBu21361-33-1
Lithium tetramethylheptanedionateLiTHD22441-13-0
Magnesium
Magnesium tetramethylheptanedionateMg(THD)221361-35-3
Molybdenum(VI)
Molybdenum oxo acetylacetonateMoO2(acac)17524-05-9
Molybdenum oxo tetramethylheptanedionateMoO2(THD)234872-98-5
Nickel
Nickel tetramethylheptanedionateNi(THD)214481-08-4
Niobium
Niobium n-butoxideNb(OBu)551030-47-8
Niobium ethoxideNb(OEt)53236-82-6
Niobium isopropoxideNb(OiPr)518368-80-4
Palladium
Palladium hexafluoroacetylacetonatePd(hfac)264916-48-9
Palladium tetramethylheptanedionatePd(THD)215214-66-1
Platinum
Platinum (trimethyl)methylcyclopentadienylMeCpPtMe394442-22-5
Potassium
Potassium tetramethylheptanedionateKTHD22441-14-1
Scandium
Scandium isopropoxideSc5O(OiPr)1360406-93-1
Scandium tetramethylheptanedionateSc(THD)3
Silicon
Bis(Diethylamino) silane(Et2N)2SiH227804-64-4
Bis(t-Butylamino) silane(tBu2N)2SiH2186598-40-3
Hexachloro disilaneCl3SiSiCl313465-77-5
Silver
Silver hexafluoroacetylacetonate cyclooctadieneAg(hfac).COD38892-25-0
Silver pivalateAg(piv)7324-58-5
Sodium
Sodium tetramethylheptanedionateNa(THD)22466-43-9
Strontium
Strontium isopropoxideSr(OiPr)288863-33-6
Strontium tetramethylheptanedionateSr(THD)236830-74-7
Tantalum
Tantalum ethoxideTa(OEt)56074-84-6
Tantalum chlorideTaCl57721-01-9
Tantalum methoxideTa(OMe)5865-35-0
Tantalum dimethlyamideTa(NMe2)519824-59-0
Tantalum tert-butylimido trisdiethylamideTa(=NtBu)(NEt2)3169896-41-7
Tantalum tetraethoxy dimethylaminoethoxideTa(OEt)4dmae172901-22-3
Tellurium
Tellurium ethoxideTe(OEt)22017-01-8
Tellurium diisopropylTe(iPr)251112-72-2
Tellurium isopropoxideTe(OiPr)21795-64-8
Thulium
Thulium tetramethylheptanedionateTm(THD)315631-58-0
Tin(II)
Tin acetateSn(OAc)2638-39-1
Tin acetylacetonateSn(acac)256508-29-3
Tin ethoxideSn(OEt)214791-99-2
Tin hexafluoroacetylacetonateSn(hfac)251319-99-4
Tin tetramethylheptanedionateSn(THD)242847-52-9
Tin(IV)
Tin tert-butoxideSn(OtBu)436809-75-3
Tin dimethylamideSn(NMe2)41066-77-9
Tin isopropoxideSn(OiPr)41184-61-8
Titanium
Titanium tert-butoxideTi(OtBu)43087-39-6
Titanium diethylamideTi(NEt2)44419-47-0
Titanium dimethylamideTi(NMe2)43275-24-9
Titanium ethoxideTi(OEt)43087-36-3
Titanium chlorideTiCl47550-45-0
Titanium isopropoxideTi(OiPr)4546-68-9 & 13421-84-6
Tungsten(V)
Tungsten ethoxide dimethoxyethaneW(OEt)5.dme26143-11-3
Tungsten(VI)
Tungsten ethoxideW(OEt)662571-53-3
Tungsten isopropoxideW(OiPr)6866594-56-1& 52321-90-1
Vanadium
Vanadium oxo isopropoxideVO(OiPr)35588-84-1
Ytterbium
Ytterbium isopropoxideYb(OiPr)36742-69-4
Ytterbium tetramethylheptanedionateYb(THD)315492-52-1
Yttrium
Yttrium isopropoxideY(OiPr)3118458-20-1
Yttrium tetramethylheptanedionateY(THD)315632-39-0
Zinc
Zinc diethylEt2Zn557-20-0
Zinc dimethyl triethylamineMe2Zn.NEt388029-05-4
Zinc methyl isopropoxideMeZn(OiPr)10217-79-5
Zinc tetramethylheptanedionateZn(THD)214363-14-05
Zirconium
Zirconium tert-butoxideZr(OtBu)42081-12-1
Zirconium ethoxideZr(OEt)418267-08-8
Zirconium chlorideZrCl410026-11-6
Zirconium diethylamideZr(NEt2)413801-49-5
Zirconium isopropoxide mono-isopropanolZr(OiPr)4.iPrOH14717-56-7 & 50939-84-9
Zirconium tetramethylheptanedionateZr(THD)418865-74-2
Zirconium tri-isopropoxy tetramethylheptanedionateZr(OiPr)3THD213177-21-0