HAFNIUM TETRACHLORIDE

Chemical Information

Synonyms: TetrachloroHafnium Hafnium (IV) Chloride

Chemical Formula: HfCl4

Description: White crystalline solid

Trace Elements:

Analysis by ICP for metallic impurities includes the elements: Ag, Al, As, Au, B, Ba, Be, Bi, Ca, Co, Cr, Cu, Fe, Ga, Ge, I, K, La, Li, Mg, Mn, Mo, Na, Ni, Nb, Pb, Se, Si, Sn, Ta, Te, Ti, V, W, Y, Zn, Zr LOD for all elements <0.1-1.0ppm

Further Information: Different grades available including Electronic, ALD, Standard

Additional Information

CAS No.: 13499-05-3

B.P.: Sublimes at 317 °C

M.P.: 432°C

V.P.: 1 mmHg at 190 °C

Solubility in water: Reacts

Solubility in organics: Soluble in hydrocarbons

Applications

Nano-materials & Thin Films
Display & Imaging
Optics & Glasses
Atomic Layer Deposition