TANTALUM TETRAETHOXY DIMETHYLAMINOETHOXIDE

Chemical Information

Chemical Formula: Ta(OC2H5)4OCH2CH2N(CH3)2

Description: Pale yellow liquid, moisture sensitive, density 1.4

Trace Elements:

Al < 1 ppm
Ca < 1 ppm
Cu < 0.1 ppm
Fe < 0.2 ppm
Mg < 0.1 ppm
K < 0.5 ppm
Na < 0.5 ppm
Nb ~ 25 ppm
Ti < 1 ppm
Zr < 1 ppm

Vapour Pressure: 0.5 torr at 100 deg C Assay (Oxide Gravimetric): min 99.8% as Ta(OC2H5)4OCH2CH2N(CH3)2

Trace Elements (Wet Test): Cl < 50 ppm

Additional Information

CAS No.: 172901-22-3

Applications

Nano-materials & Thin Films