SPECIALTY CHEMICALS FOR ELECTRONICS (ALD/CVD/MOCVD PRECURSORS)
EpiValence is highly focussed, dedicated to providing the highest quality products and services on a Global basis to meet customer requirements now and in the future. Strategic alliances and investments have secured EpiValence’s position and ensure it will remain one of the leading specialty chemical suppliers to the electronics market worldwide.
The full range of EpiValence products covers a number of diverse applications and numerous added value services including technical and customer support are available.
A core series of chemicals available are those suited to vapour phase deposition techniques such as MOCVD, ALD and CVD precursors. EpiValence expertise ensures a wide range of chemistries for different elements is covered by our standard offerings as listed below. Custom synthesis is also available to provide compounds not listed.
| Product Portfolio for CVD/ALD Processes: | ||
|---|---|---|
| Aluminium | ||
| Aluminium trimethyl | Me3Al | 75-24-1 |
| Aluminium tert-butoxide | Al(OtBu)3 | 556-91-2 |
| Aluminium dimethyl isopropoxide | Me2Al(OiPr) | 6063-89-4 |
| Aluminium tetramethylheptanedionate | Al(THD)3 | 14319-08-5 |
| Antimony | ||
| Antimony ethoxide | Sb(OEt)3 | 10433-06-4 |
| Antimony isopropoxide | Sb(OiPr)3 | 18770-47-3 |
| Barium | ||
| Barium tetramethyl heptanedionate | Ba(THD)2 | 17594-47-7 |
| Bismuth | ||
| Bismuth hexafluoracetylacetonate | Bi(hfac)3 | 141364-06-9 &142617-56-9 |
| Bismuth tetramethyl heptanedionate | Bi(THD)3 | 142617-53-6 |
| Calcium | ||
| Calcium tetramethylheptanedionate | Ca(THD)2 | 118448-18-3 |
| Cerium(IV) | ||
| Cerium isopropoxide isopropanol | Ce(OiPe)4.iPrOH | 63007-83-0 |
| Cerium tetramethylheptanedionate | Ce(THD)4 | 18960-54-8 |
| Cobalt(II) | ||
| Cobalt tetramethylheptanedionate | Co(THD)2 | 13986-53-3 |
| Copper(I) | ||
| Copper hexafluoroacetylacetonate cyclooctadiene | Cu(hfac).COD | 86233-74-1 |
| Copper(II) | ||
| Copper tetramethylheptanedionate | Cu(THD)2 | 14040-05-2 |
| Erbium | ||
| Erbium tetramethylheptanedionate | Er(THD)3 | 35733-23-4 |
| Europium | ||
| Europium tetramethylheptanedionate | Eu(THD)3 | 15522-71-1 |
| Gadolinium | ||
| Gadolinium tetramethylheptanedionate | Gd(THD)3 | 14768-15-1 |
| Gallium | ||
| Gallium tetramethylheptanedionate | Ga(THD)3 | 34228-15-4 |
| Gallium trimethyl | Me3Ga | 1445-79-0 |
| Germanium | ||
| Germanium ethoxide | Ge(OEt)4 | 13165-55-0 |
| Germanium isopropoxide | Ge(OiPr)4 | 21154-48-3 |
| Germanium methoxide | Ge(OMe)4 | 992-91-6 |
| Hafnium | ||
| Hafnium tert-butoxide | Hf(OtBu)4 | 2172-02-3 |
| Hafnium ethoxide | Hf(OEt)4 | 13428-80-3 |
| Hafnium isopropoxide isopropanol | Hf(OiPr)4.iPrOH | 59301-57-4 |
| Hafnium dimethylamide | Hf(NMe2)4 | 19782-68-4 |
| Hafnium chloride | HfCl4 | 13499-05-3 |
| Hafnium tetramethylheptanedionate | Hf(THD)4 | 63370-90-1 |
| Indium | ||
| Indium acetylacetonate | In(acac)3 | 14405-45-9 |
| Indium isopropoxide | In5O(OiPr)13 | 118240-53-2 |
| Indium Trimethyl | Me3In | 3385-78-2 |
| Iridium | ||
| Iridium acetylacetonate | Ir(acac)3 | 15635-87-7 |
| Iron(III) | ||
| Iron tetramethylheptanedionate | Fe(THD)3 | 14876-47-2 |
| Lanthanum | ||
| Lanthanum tetramethylheptanedionate | La(THD)3 | 14319-13-2 |
| Lithium | ||
| Lithium tert-butoxide | LiOtBu | 21361-33-1 |
| Lithium tetramethylheptanedionate | LiTHD | 22441-13-0 |
| Magnesium | ||
| Magnesium tetramethylheptanedionate | Mg(THD)2 | 21361-35-3 |
| Molybdenum(VI) | ||
| Molybdenum oxo acetylacetonate | MoO2(acac) | 17524-05-9 |
| Molybdenum oxo tetramethylheptanedionate | MoO2(THD)2 | 34872-98-5 |
| Nickel | ||
| Nickel tetramethylheptanedionate | Ni(THD)2 | 14481-08-4 |
| Niobium | ||
| Niobium n-butoxide | Nb(OBu)5 | 51030-47-8 |
| Niobium ethoxide | Nb(OEt)5 | 3236-82-6 |
| Niobium isopropoxide | Nb(OiPr)5 | 18368-80-4 |
| Palladium | ||
| Palladium hexafluoroacetylacetonate | Pd(hfac)2 | 64916-48-9 |
| Palladium tetramethylheptanedionate | Pd(THD)2 | 15214-66-1 |
| Platinum | ||
| Platinum (trimethyl)methylcyclopentadienyl | MeCpPtMe3 | 94442-22-5 |
| Potassium | ||
| Potassium tetramethylheptanedionate | KTHD | 22441-14-1 |
| Scandium | ||
| Scandium isopropoxide | Sc5O(OiPr)13 | 60406-93-1 |
| Scandium tetramethylheptanedionate | Sc(THD)3 | |
| Silicon | ||
| Bis(Diethylamino) silane | (Et2N)2SiH2 | 27804-64-4 |
| Bis(t-Butylamino) silane | (tBu2N)2SiH2 | 186598-40-3 |
| Hexachloro disilane | Cl3SiSiCl3 | 13465-77-5 |
| Silver | ||
| Silver hexafluoroacetylacetonate cyclooctadiene | Ag(hfac).COD | 38892-25-0 |
| Silver pivalate | Ag(piv) | 7324-58-5 |
| Sodium | ||
| Sodium tetramethylheptanedionate | Na(THD) | 22466-43-9 |
| Strontium | ||
| Strontium isopropoxide | Sr(OiPr)2 | 88863-33-6 |
| Strontium tetramethylheptanedionate | Sr(THD)2 | 36830-74-7 |
| Tantalum | ||
| Tantalum ethoxide | Ta(OEt)5 | 6074-84-6 |
| Tantalum chloride | TaCl5 | 7721-01-9 |
| Tantalum methoxide | Ta(OMe)5 | 865-35-0 |
| Tantalum dimethlyamide | Ta(NMe2)5 | 19824-59-0 |
| Tantalum tert-butylimido trisdiethylamide | Ta(=NtBu)(NEt2)3 | 169896-41-7 |
| Tantalum tetraethoxy dimethylaminoethoxide | Ta(OEt)4dmae | 172901-22-3 |
| Tellurium | ||
| Tellurium ethoxide | Te(OEt)2 | 2017-01-8 |
| Tellurium diisopropyl | Te(iPr)2 | 51112-72-2 |
| Tellurium isopropoxide | Te(OiPr)2 | 1795-64-8 |
| Thulium | ||
| Thulium tetramethylheptanedionate | Tm(THD)3 | 15631-58-0 |
| Tin(II) | ||
| Tin acetate | Sn(OAc)2 | 638-39-1 |
| Tin acetylacetonate | Sn(acac)2 | 56508-29-3 |
| Tin ethoxide | Sn(OEt)2 | 14791-99-2 |
| Tin hexafluoroacetylacetonate | Sn(hfac)2 | 51319-99-4 |
| Tin tetramethylheptanedionate | Sn(THD)2 | 42847-52-9 |
| Tin(IV) | ||
| Tin tert-butoxide | Sn(OtBu)4 | 36809-75-3 |
| Tin dimethylamide | Sn(NMe2)4 | 1066-77-9 |
| Tin isopropoxide | Sn(OiPr)4 | 1184-61-8 |
| Titanium | ||
| Titanium tert-butoxide | Ti(OtBu)4 | 3087-39-6 |
| Titanium diethylamide | Ti(NEt2)4 | 4419-47-0 |
| Titanium dimethylamide | Ti(NMe2)4 | 3275-24-9 |
| Titanium ethoxide | Ti(OEt)4 | 3087-36-3 |
| Titanium chloride | TiCl4 | 7550-45-0 |
| Titanium isopropoxide | Ti(OiPr)4 | 546-68-9 & 13421-84-6 |
| Tungsten(VI) | ||
| Tungsten ethoxide | W(OEt)6 | 62571-53-3 |
| Tungsten isopropoxide | W(OiPr)6 | 866594-56-1& 52321-90-1 |
| Vanadium | ||
| Vanadium oxo isopropoxide | VO(OiPr)3 | 5588-84-1 |
| Ytterbium | ||
| Ytterbium isopropoxide | Yb(OiPr)3 | 6742-69-4 |
| Ytterbium tetramethylheptanedionate | Yb(THD)3 | 15492-52-1 |
| Yttrium | ||
| Yttrium isopropoxide | Y(OiPr)3 | 118458-20-1 |
| Yttrium tetramethylheptanedionate | Y(THD)3 | 15632-39-0 |
| Zinc | ||
| Zinc diethyl | Et2Zn | 557-20-0 |
| Zinc dimethyl triethylamine | Me2Zn.NEt3 | 88029-05-4 |
| Zinc methyl isopropoxide | MeZn(OiPr) | 10217-79-5 |
| Zinc tetramethylheptanedionate | Zn(THD)2 | 14363-14-05 |
| Zirconium | ||
| Zirconium tert-butoxide | Zr(OtBu)4 | 2081-12-1 |
| Zirconium ethoxide | Zr(OEt)4 | 18267-08-8 |
| Zirconium chloride | ZrCl4 | 10026-11-6 |
| Zirconium diethylamide | Zr(NEt2)4 | 13801-49-5 |
| Zirconium isopropoxide mono-isopropanol | Zr(OiPr)4.iPrOH | 14717-56-7 & 50939-84-9 |
| Zirconium tetramethylheptanedionate | Zr(THD)4 | 18865-74-2 |
| Zirconium tri-isopropoxy tetramethylheptanedionate | Zr(OiPr)3THD | 213177-21-0 |
