HEXACHLORODISILANE

Chemical Information

Synonyms: HCDS

Chemical Formula: Cl3SiSiCl3

Description: Clear colourless liquid 

Further Information: Different grades available including Electronic, ALD, Standard

Additional Information

CAS No.: 13465-77-5

B.P.: 145°C

Solubility in water: Reacts violently

Solubility in organics: Soluble in hydrocarbons

Applications

Nano-materials & Thin Films Display & Imaging Hybrid & Disperse Materials Atomic Layer Deposition