HEXACHLORODISILANE
Chemical Information
Synonyms: HCDS
Chemical Formula: Cl3SiSiCl3
Description: Clear colourless liquid
Further Information: Different grades available including Electronic, ALD, Standard
Additional Information
CAS No.: 13465-77-5
B.P.: 145°C
Solubility in water: Reacts violently
Solubility in organics: Soluble in hydrocarbons
Applications
Nano-materials & Thin Films Display & Imaging Hybrid & Disperse Materials Atomic Layer Deposition