TANTALUM DIMETHYLAMIDE

Chemical Information

Synonyms: PDMAT Pentakis(dimethylamino)Tantalum

Chemical Formula: Ta(N(CH3)2)5

Description: Pale yellow solid

Trace Elements: Analysis by ICP for metallic impurities includes the elements: Ag, Al, As, Au, B, Ba, Be, Bi, Ca, Co, Cr, Cu, Fe, Ga, Ge, Hf, I, K, La, Li, Mg, Mn, Mo, Na, Ni, Nb, Pb, Se, Si, Sn, Ti, Te, V, W, Y, Zn, Zr LOD for all elements <0.1-1.0ppm

Additional Information

CAS No.: 19824-59-0 B.P.: 100°C @ 0.1 mmHg (sublimes)

V.P.: Log10 P (mmHg) = 11.3 – 4125/T (K)

Solubility in water: Reacts

Solubility in organics: Soluble in hydrocarbons

Applications

Nano-materials & Thin Films
Display & Imaging
Atomic Layer Deposition