TANTALUM TERT-BUTYLIMIDO TRISDIETHYLAMIDE

Chemical Information

Synonyms: Tris(diethylamino)(tert-butylimido)tantalum TBTDET

Chemical Formula: Ta(=NC(CH3)3)(N(CH2CH3)2)3

Description: Yellow, orange liquid

Trace Elements:

Analysis by ICP for metallic impurities includes the elements: Ag, Al, As, Au, B, Ba, Be, Bi, Ca, Co, Cr, Cu, Fe, Ga, Ge, Hf, I, K, La, Li, Mg, Mn, Mo, Na, Ni, Nb, Pb, Se, Si, Sn, Ti, Te, V, W, Y, Zn, Zr LOD for all elements <0.1-1.0ppm

Additional Information

CAS No.: 169896-41-7

B.P.: 95°C @ 0.5 mmHg

Solubility in water: Reacts

Solubility in organics: Soluble in hydrocarbons

Applications

Nano-materials & Thin Films
Catalysis & Synthesis
Atomic Layer Deposition